Stability versus structure in glow discharge hydrogenated amorphous silicon obtained from a wide range of deposition conditions

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 1, 1996, Pages 474-477

  Vignoli, S ^a   Meaudre, R ^a   Meaudre, M ^a   Roca I Cabarrocas, P ^b   Godet, C ^b   Morin, P ^b  

^a UNIVERSITÉ LYON 1   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL BONDS; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DEPOSITION; GLOW DISCHARGES; HELIUM; HYDROGEN; HYDROGENATION; KINETIC THEORY; LIGHT; MATHEMATICAL MODELS;

ANNEALING DEFECTS; DEFECT CREATION KINETICS; DILUTE PHASE SILICON HYDROGEN BOND CONCENTRATIONS; FILM DEPOSITION; GLOW DISCHARGE HYDROGENATED AMORPHOUS SILICON; LIGHT INDUCED CREATION OF DEFECTS; LIGHT INDUCED RECOVERY OF DEFECTS;

AMORPHOUS FILMS;

EID: 11744257059     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(95)00739-3     Document Type: Article

References (12)

1. S. Vignoli, R. Meaudre and M. Meaudre, Phys. Rev. B50 (1994) 7378.
2. R. Meaudre, M. Meaudre and S. Vignoli, Phys. Rev. B49 (1994) 1716.
3. R. Meaudre and M. Meaudre, Phys. Rev. B45 (1992) 12134.
4. H. Gleskova, P. Morin and S. Wagner, Appl. Phys. Lett. 62 (1993) 2063.
5. M. Meaudre, R. Meaudre and S. Vignoli, J. Appl. Phys. 77 (1995) 5702.
6. S. Vignoli, R. Meaudre and M. Meaudre, Philos. Mag. B (1996) in press.
7. D. Caputo, G. de Cesare, F. Irrera, F. Palma, M.C. Rossi, G. Conte, G. Nobile and G. Fameli, J. Non-Cryst. Solids 170 (1994) 278.
8. P. Morin and P. Roca i Cabarrocas, Mat. Res. Soc. Symp. Proc. 336 (1994) 281.
9. K. Morigaki, Jpn. J. Appl. Phys. 27 (1988) 163.
10. H. Hikita, K. Takeda, Y. Kimura, H. Yokomichi and K. Morigaki, J. Non-Cryst. Solids 164-166 (1993) 219.
11. R.A. Street, Appl. Phys. Lett. 41 (1982) 1060.
12. C. Godet, P. Morin and P. Roca i Cabarrocas, these Proceedings, p. 449.