Rapid anodic oxidation of 6H-SiC

Materials Science Forum

Volumn 264-268, Issue PART 2, 1998, Pages 873-876

  Khlebnikov, Y ^a   Madangarli, V P ^a   Khan, M A ^a   Sudarshan, T S ^a  

^a University of South Carolina   (United States)

Author keywords

Anodic Oxidation; Gate Oxide; MOS Capacitor

Indexed keywords

ANODIC OXIDATION; CAPACITORS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN OF SOLIDS; MOS DEVICES; OXIDES; SILICON CARBIDE; SUBSTRATES;

MOS CAPACITORS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 11644327931     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.264-268.873     Document Type: Article

References (4)

1. G. Restelli, et. al., Thin Solid Films, vol.23, no.1,(1993), pp.23-29.
2. L. Yong, 'Anodic Oxide Films', Academic Press, (1961).
3. V. P. Madangarli, et. al., Abstract no.216, ICSCIII-N'97, (1997).
4. E. G. Stein, et.al., J. Appl. Phys., 79 (5), (1996), pp. 2529-2534.