Micro-optical beam deflectors and modulators - Present state of development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2783, Issue , 1996, Pages 154-162

  Goring, Rolf ^a   Glöckner, Steffen ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Microoptical switches; Microoptics; Optical scanners; Piezoelectric actuators

Indexed keywords

ENERGY EFFICIENCY; LASER RECORDING; LIGHT MODULATORS; MICROOPTICS; MICROSYSTEMS; MODULATION; OPTICAL INSTRUMENTS; OPTICAL SIGNAL PROCESSING; OPTICAL SWITCHES; PIEZOELECTRICITY; SCANNING;

BEAM MANIPULATIONS; BROAD SPECTRUM; ELECTRICAL POWER CONSUMPTION; MICRO-OPTICAL COMPONENTS; MICRO-OPTICAL SWITCHES; MODULATION SYSTEMS; OPTICAL BEAM DEFLECTION; OPTICAL SCANNERS;

PIEZOELECTRIC ACTUATORS;

EID: 11644292007     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.248484     Document Type: Conference Paper

References (10)

1. H. Goto and K. Imanaka, "Super compact dual axis optical scanning unit applying a tortional spring resonator driven by a piezoelectric actuator", Proceedings of SPIE, vol. 1544, 272-281 (1991)
2. J. M. Younse, "Projection Display Systems Based on the Digital Micromirror Device (DMD) ", SPIE Conference on Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications, Austin, 1995
3. E. A. Watson, "Analysis of beam steering with decentered microlens arrays", Opt. Eng. 32(11), 2665-2670 (1993)
4. M. E. Motamedi, A. P. Andrews and W. J. Gunning, "Micro-optic laser beam scanner", Proceedings of SPIE, vol. 1992, 2-13 (1993)
5. R. Goring, W. Berner and E.-B. Kley, "Miniaturized optical systems for beam deflection and modulation", Proceedings of SPIE, vol. 1992, 54-61 (1993)
6. R. Goring, St. Glockner and F. Bohrisch "Miniaturized optical switches based on piezoelectrically driven microprism arrays", Proceedings of SPIE, vol. 2687, 23-31 (1996)
7. W. Goltsos and M. Holz, "Agile beam steering using binary optics microlens arrays", Opt. Eng. 29(11), 1392-1397 (1990)
8. U. Poßner, "Untersuchungen zur kontinuierlichen Strahlablenkung mittels stellbarer mikrooptischer Komponenten", Diploma, University of Jena (1995)
9. T. Pofiner et.al., "GRIN-components produced by ion-exchange", MOC'95 Hiroshima, 44-47 (1995)
10. G. F. McDearmon, K. M. Flood and J. M. Finlan "Comparison of conventional and microlens-array agile beam steerers", Proceedings of SPIE, vol. 2383, 167-178 (1995)