Miniaturized optical switches based on piezoelectrically driven microprism arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2687, Issue , 1996, Pages 23-31

  Goering, Rolf ^a   Gloeckner, Steffen ^a   Bohrisch, Frank ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; FIBER SWITCHES; MICROPRISM ARRAYS; MINIATURIZED OPTICAL SWITCHES;

ANISOTROPY; ARRAYS; ETCHING; PHOTORESISTS; PIEZOELECTRIC DEVICES; PRISMS; SILICON;

OPTICAL SWITCHES;

EID: 0029697825     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)