Effect of CH4 on the electron emission characteristics of active molybdenum field emitter arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3073-3076

  Chalamala, Babu R ^a,b   Wallace, Robert M ^a   Gnade, Bruce E ^a,c,d  

^a TEXAS INSTRUMENTS   (United States)

^b MOTOROLA INC   (United States)

^c DEFENSE ADVANCED RESEARCH PROJECTS AGENCY   (United States)

^d UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1142303962     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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