ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures

Vacuum

Volumn 73, Issue 1, 2004, Pages 39-45

  Draxler, M ^a   Markin, S N ^a,b   Ermolov, S N ^a,b   Schmid, K ^a   Hesch, C ^a   Poschacher, A ^a   Gruber, R ^a   Bergsmann, M ^a   Bauer, P ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

Author keywords

Charge separated analysis; Ion beam analysis; Ion scattering; Thin film analysis; Time of flight analysis

Indexed keywords

COPPER; DEPOSITION; FILM GROWTH; LIGHT SCATTERING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SURFACE PHENOMENA; THIN FILMS;

CHARGE SEPARATED ANALYSIS; ION BEAM ANALYSIS; LOW ENERGY ION SCATTERING (LEIS); TIME-OF-FLIGHT ANALYSIS;

ION BEAMS;

EID: 1142292374     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.041     Document Type: Conference Paper

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