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Volumn 34, Issue 1, 2002, Pages 763-766
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Characterization of ultrathin Cr layers on PET by RBS and XRF
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Author keywords
PET; Quantitative analysis; RBS; Ultrathin films; X ray fluorescence
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Indexed keywords
CHARACTERIZATION;
CHROMIUM ALLOYS;
DENSITY (OPTICAL);
FLUORESCENCE;
INTERFACES (MATERIALS);
MAGNETRON SPUTTERING;
METALLIZING;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEMICONDUCTING FILMS;
SPUTTER DEPOSITION;
THICKNESS MEASUREMENT;
X RAY SPECTROSCOPY;
NANOFILMS;
X RAY FLUORESCENCE SPECTROSCOPY;
POLYETHYLENE TEREPHTHALATES;
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EID: 0036693510
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/sia.1406 Document Type: Conference Paper |
Times cited : (6)
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References (5)
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