Deposition of antimony and antimony oxides by MOCVD

Chemical Vapor Deposition

Volumn 10, Issue 1, 2004, Pages 35-44

  Myers, Christopher P ^a   Haycock, Peter W ^a   Pichot, Maxime ^a,d   Horley, Graeme A ^b   Molloy, Kieran C ^b   Rushworth, Simon A ^c   Smith, Lesley M ^c  

^a KEELE UNIVERSITY   (United Kingdom)

^b University of Bath Claverton Down   (United Kingdom)

^c Epichem Ltd   (United Kingdom)

^d Ecole Nationale Superieure de Ceramique Industrielle   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY; MICROSTRUCTURE; OXIDATION; PHASE COMPOSITION; PRESSURE EFFECTS; STOICHIOMETRY; TEMPERATURE; TEXTURES; X RAY DIFFRACTION ANALYSIS;

ANTIMONY OXIDES; SENARMONTITE;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 1142268960     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200306267     Document Type: Article

References (15)

1. Z. Tianshu, P. Hing, J. Mater. Sci.: Mater. Electron. 1999, 10, 509.
2. R. J. Cava, J. J. Krajewski, Y. L. Qin, H. W. Zandbergen, J. Mater. Res. 2000, 15, 2672.
3. T. S. Zhang, P. Hing, R. F. Zhang, J. C. Zhang, Y. Li, J. Mater. Res. 2000, 15, 2356.
4. P. Brahma, S. Banerjee, S. Chakraborty, D. Chakravorty, J. Appl. Phys. 2000, 88, 6526.
5. Z. L. Zhang, L. Guo, W. D. Wang, J. Mater. Res. 2001, 16, 803.
6. R. K. Grasselli, J. D. Burrington, Adv. Catal. 1981, 30, 133.
7. G. Centi, S. Perathoner, Appl. Catal. A 1995, 124, 317.
8. T. J. A. R. Hitch, C. L. Honeybourne, J. Mater. Chem. 1996, 6, 285.
9. P. W. Haycock, G. A. Horley, K. C. Molloy, C. P. Myers, S. A. Rushworth, L. M. Smith, J. Phys. IV 2001, 11, Pr-3-1045.
10. W. A. Badawy, E. A. El-Taher, Thin Solid Films 1988, 158, 277.
11. W. A. Badawy, Thin Solid Films 1988, 186, 59.
12. P. W. Haycock, G. A. Horley, K. C. Molloy, C. P. Myers, S. A. Rushworth, L. M. Smith, Chem. Vap. Deposition 2001, 7, 191.
13. G. A. Horley, M. F. Mahon, K. C. Molloy, P. W. Haycock, C. P. Myers, Inorg. Chem. 2002, 41, 5052.
14. J. Aitchison, J. A. C. Brown, The Lognormal Distribution, Cambridge University Press, Cambridge 1957, p. 31.
15. D. A. Edwards, R. M. Harker, M. F. Mahon, K. C. Molloy, J. Mater. Chem. 1999, 9, 1771.