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Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 37-40
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Molecular dynamics simulation of silicon nanostructures
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Author keywords
Irradiation; Molecular Dynamics; Silicon
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Indexed keywords
MOLECULAR DYNAMICS SIMULATION;
N-TYPE SEMICONDUCTORS;
NANOWIRE SURFACE;
SILICON NANOSTRUCTURES;
COMPUTER SIMULATION;
ION BOMBARDMENT;
ION IMPLANTATION;
MOLECULAR DYNAMICS;
SEMICONDUCTOR DOPING;
SILICON;
SYNTHESIS (CHEMICAL);
NANOSTRUCTURED MATERIALS;
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EID: 11344262802
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2004.10.019 Document Type: Conference Paper |
Times cited : (28)
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References (7)
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