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Thin Solid Films

Volumn 322, Issue 1-2, 1998, Pages 63-67

SEM and XPS studies of titanium dioxide thin films grown by MOCVD

(6) Babelon, P a Dequiedt, A S a Mostefa Sba H a Bourgeois, S a Sibillot, P a Sacilotti, M a

a UNIVERSITÉ DE BOURGOGNE (France)

Author keywords

Insulator; MOCVD; Oxides; Tio2; Titanium oxide

Indexed keywords

ALUMINA; FILM GROWTH; FILM PREPARATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON; SPUTTER DEPOSITION; SURFACE PROPERTIES; THIN FILMS; TITANIUM DIOXIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

METAL ORGANIC PRECURSORS;

DIELECTRIC FILMS;

EID: 0032496477 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00958-9 Document Type: Article

Times cited : (176)

References (16)

1
- 0026943720
- A. Erbil, W. Braun, B.S. Kwak, J. Cryst. Growth 124 (1992) 684.
- (1992) J. Cryst. Growth , vol.124 , pp. 684
- Erbil, A.¹ Braun, W.² Kwak, B.S.³

2
- 0001101160
- K.S. Kim, M.A. Barteau, J. Catal. 125 (1990) 353.
- (1990) J. Catal. , vol.125 , pp. 353
- Kim, K.S.¹ Barteau, M.A.²

3
- 0030147017
- G. Zhai, H. Kozuka, T. Yoko, Thin Solid Films 277 (1996) 147.
- (1996) Thin Solid Films , vol.277 , pp. 147
- Zhai, G.¹ Kozuka, H.² Yoko, T.³

4
- 0028516346
- P. Löbl, M. Huppertz, D. Mergel, Thin Solid Films 251 (1994) 72.
- (1994) Thin Solid Films , vol.251 , pp. 72
- Löbl, P.¹ Huppertz, M.² Mergel, D.³

5
- 84957349911
- D. Leinen, J.P. Espinos, A. Fernandez, A.R. Gonzalez-Elipe, J. Vac. Sci. Technol. A12 (1994) 2728.
- (1994) J. Vac. Sci. Technol. , vol.A12 , pp. 2728
- Leinen, D.¹ Espinos, J.P.² Fernandez, A.³ Gonzalez-Elipe, A.R.⁴

6
- 0000494123
- Y. Sorek, R. Reisfeld, Appl. Phys. Lett. 63 (1993) 3256.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 3256
- Sorek, Y.¹ Reisfeld, R.²

7
- 0028400662
- A. Giovanni, G.A. Battiston, R. Gerbasi, M. Porchia, A. Marigo, Thin Solid Films 239 (1994) 186.
- (1994) Thin Solid Films , vol.239 , pp. 186
- Giovanni, A.¹ Battiston, G.A.² Gerbasi, R.³ Porchia, M.⁴ Marigo, A.⁵

8
- 0347056604
- Thesis, Université de Bourgogne
- P. Babelon, Thesis, Université de Bourgogne, 1997.
- (1997)
- Babelon, P.¹

9
- 0347687154
- to be published
- Ph. Babelon, P. Sibillot, A.S. Dequiedt, S. Bourgeois, P. Bertrand, P.A. Gollier, J.D. Ganiére, M. Sacilotti, to be published.
- Babelon, Ph.¹ Sibillot, P.² Dequiedt, A.S.³ Bourgeois, S.⁴ Bertrand, P.⁵ Gollier, P.A.⁶ Ganiére, J.D.⁷ Sacilotti, M.⁸

10
- 0000164492
- B.A. Movshan, A.V. Demshishin, Phys. Met. Metallogr. 28 (1969) 83.
- (1969) Phys. Met. Metallogr. , vol.28 , pp. 83
- Movshan, B.A.¹ Demshishin, A.V.²

11
- 0029291533
- S. Bourgeois, P. Le Seigneur, M. Perdereau, Surf. Sci. 328 (1995) 105.
- (1995) Surf. Sci. , vol.328 , pp. 105
- Bourgeois, S.¹ Le Seigneur, P.² Perdereau, M.³

12
- 0012914888
- W. Göpel, J.A. Anderson, D. Frankel, M. Jaenig, K. Phillips, J.A. Schärfer, G. Rocker, Surf. Sci. 139 (1984) 333.
- (1984) Surf. Sci. , vol.139 , pp. 333
- Göpel, W.¹ Anderson, J.A.² Frankel, D.³ Jaenig, M.⁴ Phillips, K.⁵ Schärfer, J.A.⁶ Rocker, G.⁷

13
- 0002639556
- Sputtering by particle bombardment II
- R. Behrisch (Ed.), Springer-Verlag, Berlin
- G. Betz, G.K. Wehner, Sputtering by particle bombardment II, in: R. Behrisch (Ed.), Topics in Applied Physics, Vol. 52, Springer-Verlag, Berlin, 1983, p. 11.
- (1983) Topics in Applied Physics , vol.52 , pp. 11
- Betz, G.¹ Wehner, G.K.²

14
- 0025401699
- K. Kamata, K. Maruyama, S. Amano, H. Fukazawa, J. Mater. Sci. Lett. 9 (1990) 316.
- (1990) J. Mater. Sci. Lett. , vol.9 , pp. 316
- Kamata, K.¹ Maruyama, K.² Amano, S.³ Fukazawa, H.⁴

15
- 0000443673
- Y. Sakashita, H. Segawa, J. Appl. Phys. 77 (1995) 5995.
- (1995) J. Appl. Phys. , vol.77 , pp. 5995
- Sakashita, Y.¹ Segawa, H.²

16
- 0028387893
- T.W. Kim, M. Jung, H.J. Kim, T.H. Park, Y.S. Yoon, W.N. Kang, S.S. Yom, H.K. Na, Appl. Phys. Lett. 64 (1994) 1407.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1407
- Kim, T.W.¹ Jung, M.² Kim, H.J.³ Park, T.H.⁴ Yoon, Y.S.⁵ Kang, W.N.⁶ Yom, S.S.⁷ Na, H.K.⁸

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