Handling AFM cantilever chips by a force feedback-based micromanipulation system

Proceedings of the IEEE Conference on Nanotechnology

Volumn , Issue , 2001, Pages 157-161

  Menciassi, A ^a   Eisinberg, A ^a   Mazzoni, M ^a   Scalari, G ^a   Dario, P ^a  

^a SCUOLA SUPERIORE SANT ANNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMANIPULATORS; NANOCANTILEVERS; NANOTECHNOLOGY; SILICON WAFERS;

AFM CANTILEVERS; FORCE FEEDBACK; MICRO MANIPULATION SYSTEMS; MICRO-MACHINED; NANO METER RANGE; RAZOR BLADES; SILICON CANTILEVER; YIELD RATES;

ATOMIC FORCE MICROSCOPY;

EID: 11244321450     PISSN: 19449399     EISSN: 19449380     Source Type: Journal    
DOI: 10.1109/NANO.2001.966411     Document Type: Article

References (8)

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