Assessing charging effects on spectral quality for X-ray microanalysis in low voltage and variable pressure/environmental scanning electron microscopy

Microscopy and Microanalysis

Volumn 10, Issue 6, 2004, Pages 739-744

  Newbury, Dale E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Charging; Energy dispersive X ray spectrometry; Environmental scanning electron microscopy; Insulating materials; Low voltage scanning electron microscopy; Scanning electron microscopy; Spectral artifacts; Variable pressure scanning electron microscopy

Indexed keywords

EID: 11244286099     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S143192760404070X     Document Type: Conference Paper

References (5)

1. DYSON, N.A. (1990). X-rays in Atomic and Nuclear Physics, 2nd ed. Cambridge: Cambridge University Press.
2. GOLDSTEIN, J.I., NEWBURY, D.E., JOY, D.C., LYMAN, C., ECHLIN, P., LIFSHIN, E., SAWYER, L. & MICHAEL, J. (2003). Scanning Electron Microscopy and X-ray Microanalysis, 3rd ed. New York: Kluwer-Plenum.
3. th International Conference on X-ray Optics and Microanalysis, Beaman, D.R., Ogilvie, R.E. & Wittry, D.B. (Eds.), p. 141. Midland, MI: Pendell.
4. MYKLEBUST, R.L., FIORI, C.E. & NEWBURY, D.E. (1990). A robust method for determining the Duane-Hunt limit from energy dispersive spectra. In Microbeam Analysis - 1990, pp. 147-149. San Francisco: San Francisco Press.
5. NEWBURY, D.E. (2000). Measures for spectral quality in low-voltage X-ray microanalysis. Scanning 22, 345-351.