Measures for spectral quality in low-voltage x-ray microanalysis

Scanning

Volumn 22, Issue 6, 2000, Pages 345-351

  Newbury, D E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Charging; Conducting grid method; Duane Hunt limit; Electron beam x ray microanalysis; Low voltage scanning electron microscopy; Overvoltage

Indexed keywords

SILICON DIOXIDE;

ARTICLE; ELECTRIC POTENTIAL; EXCITATION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTY; X RAY MICROANALYSIS;

CONDUCTIVE MATERIALS; ELECTRIC POTENTIAL; ELECTRON BEAMS; ELECTRON TRANSITIONS; MICROANALYSIS; X RAY ANALYSIS;

CONDUCTING GRID METHOD; DUANE-HUNT BREMSSTRAHLUNG; LOW VOLTAGE X RAY MICROANALYSIS;

SCANNING ELECTRON MICROSCOPY;

EID: 0034488671     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950220602     Document Type: Article

References (3)

1. Low-voltage scanning electron microscopy
2. A robust method for determining the Duane-Hunt limit from energy-dispersive spectra