Blazed binary diffractive gratings with antireflection coating for improved operation at 10.6 μm

Optical Engineering

Volumn 43, Issue 11, 2004, Pages 2583-2588

  Lee, Mane Si Laure ^a   Legagneux, Pierre ^a   Lalanne, Philippe ^b   Rodier, Jean Claude ^b   Gallais, Patrick ^c   Germain, Chantal ^c   Rollin, Joel ^c  

^a THALES RESEARCH AND TECHNOLOGY   (France)

^b UNIV PARIS SUD   (France)

^c Thales Angénieux ^*  (France)

Author keywords

Blazed gratings; Diffractive optics; Subwavelength structures; Thermal infrared

Indexed keywords

ANTIREFLECTION COATINGS; DIFFRACTIVE OPTICS; INFRARED IMAGING; LIGHT POLARIZATION; OPTICAL DESIGN; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; VAPOR DEPOSITION;

BLAZED GRATINGS; EVAPORATION DEPOSITION; SUBWAVELENGTH STRUCTURES; THERMAL INFRARED; TRANSVERSE MAGNETIC MODE;

DIFFRACTION GRATINGS;

EID: 11244266041     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1802253     Document Type: Article

References (16)

1. W. M. Farn, "Binary gratings with increased efficiency," Appl. Opt. 31, 4453-4458 (1992).
2. M. Born and E. Wolf, Principle of Optics, 6th ed., Chap. 1, p. 705, Macmillan, New York (1964).
3. H. Haidner, P. Kipfer, J. T. Sheridan, J. Schwider, N. Streibl, M. Collischon, J. Hutfless, and M. März, "Diffraction grating with rectangular grooves exceeding 80% diffraction efficiency," Infrared Phys. 34, 467-475 (1993).
4. P. Kipfer, M. Collischon, H. Haidner, and J. Schwider, " Subwavelength structures and their use in diffractive optics," Opt. Eng. 35 726-731 (1996).
5. F. T. Chen and H. G. Craighhead, "Diffractive phase elements on two-dimensional artificial dielectrics," Opt. Lett. 20, 121-123 (1995).
6. F. T. Chen and H. G. Craighead, "Diffractive lens fabricated with mostly zeroth-order gratings," Opt. Lett. 21, 177-179 (1996).
7. J. R. Wendt, G. A. Vawter, R. E. Smith, and M. E. Warren, "Subwavelength, binary lenses at infrared wavelengths," J. Vac. Sci. Technol. B 15, 2946-2949 (1997).
8. J. N. Mait, A. Scherer, O. Dial, D. W. Prather, and X. Gao, "Diffractive lens fabricated with binary features less than 60 nm," Opt. Lett. 25, 381-383 (2000).
9. P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, "Blazed-binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings," Opt. Lett. 23 1081-1083 (1998).
10. M. S. L. Lee, P. Lalanne, J. C. Rodier, and E. Cambril, "Wide-field-angle behavior of blazed-binary gratings in the resonance domain," Opt. Lett. 25, 1690-1692 (2000).
11. M. S. L. Lee, P. Lalanne, J. C. Rodier, P. Chavel, E. Cambril, and Y. Chen, "Imaging with blazed-binary diffractive elements," Pure Appl. Opt. 4, S119-124 (2002).
12. M. S. L. Lee, J. C. Rodier, P. Lalanne, P. Legagneux, P. Gallais, C. Germain, and J. Rollin, "Blazed-binary diffractive gratings with antireflection coating for improved operation at 10.6 μm," Proc. SPIE 5184, 108-114 (2003).
13. P. Lalanne and M. Hutley, "The optical properties of artificial media structured at a subwavelength scale," in Encyclopedia of Optical Engineering, R. Driggers, Ed., Marcel Dekker, New York (2003 ).
14. P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, " Design and fabrication of blazed-binary diffractive elements with sampling periods smaller than the structural cutoff," J. Opt. Soc. Am. A 16, 1143-1156 (1999).
15. M. G. Moharam, E. B. Grann, D. A. Pommet, and T. K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Am. A 12, 1068-1076 (1995).
16. P. Lalanne and G. M. Morris, "Highly improved convergence of the coupled-wave method for TM polarization," J. Opt. Soc. Am. A 13, 779-784 (1996).