Original optical metrologies of large components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5252, Issue , 2004, Pages 322-333

  Cimma, B ^a   Forest, D ^a   Ganau, P ^a   Lagrange, B ^a   Mackowski, J M ^a   Michel, G ^a   Montorio, J L ^a   Morgado, N ^a   Pignard, R ^a   Pinard, L ^a   Remillieux, A ^a  

^a SMA VIRGO   (France)

Author keywords

Absorption; Birefringence; Optical metrology; Roughness; Scattering; Stitching interferometry

Indexed keywords

ACOUSTIC NOISE; ADSORPTION; BIREFRINGENCE; CONTAMINATION; FREQUENCIES; PROFILOMETRY; SCATTERING; SPUTTERING;

OPTICAL METROLOGY; STITCHING INTERFEROMETRY;

INTERFEROMETERS;

EID: 11144353648     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.513279     Document Type: Conference Paper

References (10)

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