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Volumn 5490, Issue PART 3, 2004, Pages 1296-1303
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Individual testing of replicated micro-lenses: Wavefront error and psf measurements
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Author keywords
Adaptive optics; Fibre bundle; MACAO; Metrology; Microlenses; Shack Hartmann; WFE
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Indexed keywords
ADAPTIVE OPTICS;
DIFFRACTIVE OPTICS;
LITHOGRAPHY;
MEASUREMENT THEORY;
OPTICAL SENSORS;
OSCILLATIONS;
PHOTODIODES;
WAVEFRONTS;
FIBRE BUNDLE;
MACAO PROJECTS;
SHACK-HARTMANN;
WFE;
MICROLENSES;
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EID: 11144285414
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.551705 Document Type: Conference Paper |
Times cited : (2)
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References (5)
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