Effects of surface treatment on sapphire substrates

Journal of Crystal Growth

Volumn 274, Issue 1-2, 2005, Pages 241-245

  Wang, Yinzhen ^a,b   Liu, Shiliang ^a,b   Peng, Guanliang ^a,b   Zhou, Shengming ^a   Xu, Jun ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

A1. Substrate; A1. Surface; B1. Sapphire

Indexed keywords

LASER DIODE DEVICES; SUBSURFACE DAMAGES; SURFACE QUALITY;

ATOMIC FORCE MICROSCOPY; POLISHING; RAMAN SPECTROSCOPY; SEMICONDUCTOR DEVICES; SURFACE TREATMENT; X RAY DIFFRACTION ANALYSIS;

SAPPHIRE;

EID: 11144278604     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.09.074     Document Type: Article

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