Soft mold-dry etch: A novel hydrogel patterning technique for biomedical applications

Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings

Volumn 26 III, Issue , 2004, Pages 1983-1986

  Lei, Ming ^a   Gu, Yuandong ^a   Baldi, Antonio ^a,c   Siegel, Ronald A ^a,b   Ziaie, Babak ^a,b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b University of Minnesota   (United States)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

BioMEMS; Dry patterning; Hydrogel; Microfluidic; Soft lithography

Indexed keywords

ACTUATORS; ALUMINUM; BIOMEDICAL ENGINEERING; BODY FLUIDS; DRY ETCHING; FLOW CONTROL; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PH EFFECTS; SENSORS; THIN FILMS;

BIOMEMS; DRY PATTERNING; MICROFLUIDICS; SOFT LITHOGRAPHY;

HYDROGELS;

EID: 11144258870     PISSN: 05891019     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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