An environmentally responsive microflow controller with double side tethered structure for the entrapment of hydrogel

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 84-87

  Baldi, Antonio ^a   Lei, Ming ^a   Gu, Yuandong ^b   Siegel, Ronald A ^a,b   Ziaie, Babak ^a  

^a University of Minnesota   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLOW CONTROL; FLOW OF FLUIDS; HYDROGELS; MEMBRANES; ORIFICES; POLYMERIZATION; SILICON; SWELLING;

DEEP TRENCH ETCH; FLUIDIC ACTUATOR; GLUCOSE SENSITIVE; MICROFLOW CONTROLLER; TEMPERATURE SENSITIVE; TETHERED STRUCTURE;

MICROACTUATORS;

EID: 0038156108     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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5. Y. Gu, A. Baldi, B. Ziaie, and R. A. Siegel, "A Micromachined, Hydrogel-Gated Smart Flow Controller," 2002 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head, USA, June 2002.
6. Y. Gu, and R. A. Siegel, "Swelling Behaviors of Phenylboronic Acid Hydrogel in Glucose Solution," in Proc. 28th International Symposium on Controlled Release of Bioactive Materials, San Diego, CA, 2001, paper no 668.