Practical, real-time multivariate FDC

Semiconductor International

Volumn 27, Issue 13, 2004, Pages 51-56

  Smith, John A ^a   Lin, K C ^a   Richter, Matt ^a   Levami, Uzi ^a  

^a MKS Instruments   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED EQUIPMENT CONTROL (AEC); FAULT DETECTION AND CLASSIFICATION (FDC); MULTIVARIATE ANALYSIS (MVA); UNIVARIATE STATISTICAL PROCESS CONTROL (USPC);

DATA ACQUISITION; DATA REDUCTION; DATA TRANSFER; GATEWAYS (COMPUTER NETWORKS); INTERFACES (COMPUTER); MATHEMATICAL MODELS; NETWORK PROTOCOLS; ONLINE SYSTEMS; OPTIMIZATION; REAL TIME SYSTEMS; SENSOR DATA FUSION; STATISTICAL PROCESS CONTROL; WORLD WIDE WEB;

FAULT TOLERANT COMPUTER SYSTEMS;

EID: 11044237708     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (10)

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