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Volumn 11, Issue 11, 2004, Pages 5102-5107
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A comparative analysis of the electron energy distribution function obtained by regularization methods and by a least-squares fitting
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC POTENTIAL;
ELECTRON CYCLOTRON RESONANCE;
INTEGRAL EQUATIONS;
LEAST SQUARES APPROXIMATIONS;
PHYSICAL VAPOR DEPOSITION;
PROBLEM SOLVING;
STABILITY;
IONIZED GASES;
MICROWAVE ENERGY;
PLASMA PARAMETERS;
REGULARIZATION METHODS;
ELECTRON ENERGY ANALYZERS;
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EID: 10944254787
PISSN: 1070664X
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1802435 Document Type: Article |
Times cited : (6)
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References (22)
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