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Volumn 11, Issue 11, 2004, Pages 5102-5107

A comparative analysis of the electron energy distribution function obtained by regularization methods and by a least-squares fitting

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; INTEGRAL EQUATIONS; LEAST SQUARES APPROXIMATIONS; PHYSICAL VAPOR DEPOSITION; PROBLEM SOLVING; STABILITY;

EID: 10944254787     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1802435     Document Type: Article
Times cited : (6)

References (22)
  • 8
    • 0021781807 scopus 로고
    • J. Musil, Vacuum 36, 161 (1986).
    • (1986) Vacuum , vol.36 , pp. 161
    • Musil, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.