Anodic nano-porous humidity sensing thin films for the commercial and industrial applications

Conference Record - IAS Annual Meeting (IEEE Industry Applications Society)

Volumn 2, Issue , 2004, Pages 1207-1210

  Haji Sheikh, Michael J ^a   Ervin, Joe ^a   Andersen, Michael ^a  

^a NORTHERN ILLINOIS UNIVERSITY   (United States)

Author keywords

Alumina; Humidity; Nanoporous; Sensors

Indexed keywords

ANODIZING ALUMINUM; HUMIDITY SENSORS; SILICON SUBSTRATES; THIN FILM SENSORS;

ALUMINA; ATMOSPHERIC HUMIDITY; INTEGRATED CIRCUITS; MULTILAYERS; NANOSTRUCTURED MATERIALS; PERMITTIVITY; SILICON; THIN FILMS;

SENSORS;

EID: 10944232798     PISSN: 01972618     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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