Highly c-axis oriented CaRuO3 thin films on LaAlO3 buffered Si(100) substrates by pulsed laser deposition

Physica Status Solidi (A) Applied Research

Volumn 201, Issue 14, 2004, Pages

  Tian, H Y ^a   Wang, J ^a   Wang, Y ^a   Qi, J Q ^a   Wong, K H ^a   Chan, H L W ^a   Choy, C L ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; DIELECTRIC MATERIALS; LANTHANUM COMPOUNDS; MICROSTRUCTURE; PULSED LASER DEPOSITION; SILICON; THIN FILMS;

BUFFER LAYERS; DEPOSITION TEMPERATURE; LATTICE MISMATCH; SEMICONDUCTOR TAPES;

CALCIUM COMPOUNDS;

EID: 10944226792     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.200409068     Document Type: Article

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