SCOPUS 정보 검색 플랫폼

Volumn 151, Issue 12, 2004, Pages

Second-order normal force brought about by polishing with a polyurethane pad

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; LOADS (FORCES); OXIDES; PARAMETER ESTIMATION; RHEOLOGY; SILICA; STRAIN;

HYDRODYNAMIC POLISHING; NONLINEARITY; SHALLOW TRENCH ISOLATION (STI); SHEAR RATE;

CHEMICAL MECHANICAL POLISHING;

EID: 10844279982 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1812738 Document Type: Article

Times cited : (4)

References (16)

1
- 0003508875
- John Wiley & Sons, New York
- J. M. Steigerwald, S. P. Murarka, and R. I. Gutman, Chemical Mechanical Planarization of Microelectronic Materials, John Wiley & Sons, New York (1997).
- (1997) Chemical Mechanical Planarization of Microelectronic Materials
- Steigerwald, J.M.¹ Murarka, S.P.² Gutman, R.I.³

2
- 10844228712
- Springer-Verlag, New York
- Chemical-Mechanical Planarization of Semiconductor Materials, M. R. Oliver, Editor, Springer-Verlag, New York (2003).
- (2003) Chemical-mechanical Planarization of Semiconductor Materials
- Oliver, M.R.¹

3
- 10844222156
- M. Ronay and C. L. Rohn, Tribol. Lett., 14, 205 (2003).
- (2003) Tribol. Lett. , vol.14 , pp. 205
- Ronay, M.¹ Rohn, C.L.²

4
- 0002182919
- A. M. Freudenthal and M. Ronay, Proc. R. Soc. London, Ser. A. 292, 14 (1966).
- (1966) Proc. R. Soc. London, Ser. A. , vol.292 , pp. 14
- Freudenthal, A.M.¹ Ronay, M.²

5
- 0007068530
- B. Albrecht and A. M. Freudenthal, Int. J. Solids Struct., 2, 555 (1966).
- (1966) Int. J. Solids Struct. , vol.2 , pp. 555
- Albrecht, B.¹ Freudenthal, A.M.²

6
- 0000298336
- R. S. Rivlin, Philos. Trans. R. Soc. London, Ser. A. 240, 459, 509 (1948).
- (1948) Philos. Trans. R. Soc. London, Ser. A. , vol.240 , pp. 459
- Rivlin, R.S.¹

7
- 0000298338
- R. S. Rivlin, Philos. Trans. R. Soc. London, Ser. A, 241, 379 (1948).
- (1948) Philos. Trans. R. Soc. London, Ser. A , vol.241 , pp. 379
- Rivlin, R.S.¹

8
- 36849119213
- R. S. Rivlin, J. Appl. Phys., 18, 444 (1947).
- (1947) J. Appl. Phys. , vol.18 , pp. 444
- Rivlin, R.S.¹

9
- 0000298337
- R. S. Rivlin and D. W. Saunders, Philos. Trans. R. Soc. London, Ser. A, 243, 251 (1951).
- (1951) Philos. Trans. R. Soc. London, Ser. A , vol.243 , pp. 251
- Rivlin, R.S.¹ Saunders, D.W.²

10
- 0003643579
- Springer, New York
- B. D. Coleman, H. Markowitz, and W. Noll, Viscometric Flows of Non-Newtonian Fluids, Springer, New York (1966).
- (1966) Viscometric Flows of Non-newtonian Fluids
- Coleman, B.D.¹ Markowitz, H.² Noll, W.³

11
- 0003753394
- Hanser Publ., Munich
- C. L. Rohn, Analytical Polymer Rheology. p. 81, Hanser Publ., Munich (1995).
- (1995) Analytical Polymer Rheology , pp. 81
- Rohn, C.L.¹

12
- 0042302055
- (characterization for STI). May 4, 1999. Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA 02139
- D. Ouma, B. Lee, and D. Boning, Dielectric CMP characterization mask documentation. Version 1.2 (characterization for STI). May 4, 1999. Microsystems Technology Laboratories, Massachusetts Institute of Technology, Cambridge, MA 02139.
- Dielectric CMP Characterization Mask Documentation. Version 1.2
- Ouma, D.¹ Lee, B.² Boning, D.³

13
- 10844295465
- Paper presented at SEMICON/WEST, July San Francisco, CA
- D. Boning, Paper presented at SEMI CMP Standards Meeting, SEMICON/WEST, July 1999, San Francisco, CA.
- (1999) SEMI CMP Standards Meeting
- Boning, D.¹

14
- 0028272548
- S. F. Scares, D. R. Baselt, J. P. Black, K. C. Jungling, and W. K. Stowell, Appl. Opt., 33, 89 (1994).
- (1994) Appl. Opt. , vol.33 , pp. 89
- Scares, S.F.¹ Baselt, D.R.² Black, J.P.³ Jungling, K.C.⁴ Stowell, W.K.⁵

15
- 10844275273
- Eco Physics, P.O. Box 282, Durnten, Switzerland, CH-8635
- Eco Physics, P.O. Box 282, Durnten, Switzerland, CH-8635.

16
- 0343878217
- T. Vo, T. Buley, and J. J. Gagliardi, Solid State Technol. 43, 123 (2000).
- (2000) Solid State Technol. , vol.43 , pp. 123
- Vo, T.¹ Buley, T.² Gagliardi, J.J.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.