EEDF measurements in the diffusion-extraction region of a plasma in ARIS (Applied Radio-frequency Ion Source)

Contributions to Plasma Physics

Volumn 44, Issue 7-8, 2004, Pages 629-634

  Soberon F ^a   Ellingboe, A R ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

AC superimposing technique; Druyvesteyn; Langmuir probe

Indexed keywords

ION SOURCES; LANGMUIR PROBES;

AC SUPERIMPOSING TECHNIQUE; AC SUPERPOSITION METHODS; DRUYVESTEYN; ELECTROSTATIC PROBE; MAGNETIC-FIELD; PLASMA CHEMISTRIES; PLASMA SYSTEMS; RADIO-FREQUENCY ION SOURCES; SPATIAL DEVELOPMENT; SPATIALLY RESOLVED;

EXTRACTION;

EID: 10844274758     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.200410093     Document Type: Article

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