Microfabrication by hot embossing and injection molding at LASTI

Microsystem Technologies

Volumn 10, Issue 10, 2004, Pages 682-688

  Mekaru, H ^a   Yamada, T ^a   Yan, S ^a   Hattori, T ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MACHINING; MICROSTRUCTURE; MOLDS; POLYCARBONATES; POLYMETHYL METHACRYLATES; SCANNING ELECTRON MICROSCOPY; X RAY LITHOGRAPHY;

MICROFABRICATION; NICKEL ELECTROFOMING TECHNIQUES; X-RAY LITHOGRAPHY;

INJECTION MOLDING;

EMBOSSING; HOT FORMING; INJECTION MOLDING; MACHINING; MOLDS; POLYCARBONATES; POLYMETHYL ACRYLATE; SCANNING ELECTRON MICROSCOPY;

EID: 10844273149     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0401-8     Document Type: Conference Paper

References (4)

1. Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D (1986) Microelectron Eng 4: pp. 35-42
2. Mekaru H; Utsumi Y; Hattori T (2001) Nucl Instrum Meth A467-268: 741-744
3. Ando A; Amano S; Hashimoto S; Kinoshita H; Miyamoto S; Mochizuki T; Niibe M; Shoji Y; Terasawa M; Watanabe T; kumagai N (1998) J Synchrotron Rad 5: 342-344
4. Yoshimura C; Kobayashi Y; Aoki H; Ueno H; Suguyama S (2002) Technical Digest of the 17th Sensor Symposium pp. 407-412