SCOPUS 정보 검색 플랫폼

Volumn 151, Issue 12, 2004, Pages

Self-conditioning fixed abrasive pad in CMP

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; CATALYSTS; DEFORMATION; ELASTICITY; HYDROPHILICITY; OXIDATION; POLYMERS; SURFACE PROPERTIES; SWELLING;

ABRASIVE PADS; HYDROPHILIC POLYMERS; OXIDIZERS; PATTERN SELECTIVITY;

CHEMICAL MECHANICAL POLISHING;

EID: 10844272437 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1813951 Document Type: Article

Times cited : (55)

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