Scatterometer of visible light for 2D rough surfaces

Review of Scientific Instruments

Volumn 75, Issue 11, 2004, Pages 4820-4823

  Rodriguez Herrera O G ^a   Rosete Aguilar, M ^a   Bruce, N C ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

CAMERAS; CHARGE COUPLED DEVICES; DIFFRACTION; IMAGE ANALYSIS; MIRRORS; OPTICS; SCATTERING; SURFACE ROUGHNESS;

MICROCIRCUITS; NEAR INFRARED REGION; SCATTEROMETER; VISIBLE LIGHT;

TWO DIMENSIONAL;

EID: 10844230854     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1809300     Document Type: Article

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