Fabrication of ultrathin IrO2 top electrode for improving thermal stability of metal-insulator-metal field emission cathodes

Thin Solid Films

Volumn 471, Issue 1-2, 2005, Pages 236-242

  Park, Tae Joo ^a   Jeong, Doo Seok ^a   Hwang, Cheol Seong ^a   Park, Min Soo ^b   Kang, Nam Seok ^b  

^a Seoul National University   (South Korea)

^b LG Electronics Inc   (South Korea)

Author keywords

Capacitor; Field emission display; Indium dioxide; Sputtering

Indexed keywords

CAPACITORS; CATHODES; CONCENTRATION (PROCESS); ELECTRIC CHARGE; ELECTRIC INSULATORS; ELECTROCHEMICAL ELECTRODES; METAL ANALYSIS; SPUTTERING; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; ULTRATHIN FILMS;

CHARGE TRAP; FIELD EMISSION DISPLAY; IRIDIUM DIOXIDE; MULTI-METAL ELECTRODE FILM; RESPUTTERING;

IRIDIUM COMPOUNDS;

EID: 10644239245     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.05.131     Document Type: Article

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