Effects of surface treatments and annealing on carbon-based molecular sieve membranes for gas separation

Applied Surface Science

Volumn 240, Issue 1-4, 2005, Pages 161-174

  Wang, Liang Jun ^a   Hong, Franklin Chau Nan ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Carbon molecular sieve membranes; Gas separation; Inductively coupled plasma; Ion bombardment; Plasma chemical vapor deposition

Indexed keywords

ANNEALING; CARBON; CHEMICAL VAPOR DEPOSITION; DESORPTION; HIGH TEMPERATURE EFFECTS; ION BOMBARDMENT; MEMBRANES; MOLECULAR SIEVES; PYROLYSIS;

CARBON MOLECULAR SIEVE MEMBRANES (CMSM); GAS SEPARATION; INDUCTIVELY COUPLED PLASMA (ICP) ANALYSIS; PLASMA CHEMICAL VAPOR DEPOSITION (CVD);

SURFACE TREATMENT;

EID: 10444282014     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.06.026     Document Type: Article

References (24)

1. Y.D. Chen, R.T. Yang, Preparation of carbon molecular sieve membrane and diffusion of binary mixtures in the membrane, Ind. Eng. Chem. Res. 33 (1994) 3146.
2. H.C. Foley, Carbogenic molecular sieves: synthesis, properties and applications, Micropor. Mater. 4 (1995) 407.
3. A.B. Fuertes, T.A. Centeno, Preparation of supported asymmetric carbon molecular sieve membranes, J. Membr. Sci. 144 (1998) 105.
4. J.E. Koresh, A. Soffer, Molecular sieve carbon permiselective membrane. Part I. Presentation of a new device for gas mixture separation, Separ. Sci. Technol. 18 (1983) 723.
5. 2 mixture, Separ. Sci. Technol. 23 (1987) 973.
6. M.B. Rao, S. Sircar, C. Golden, Adsorbent membranes for gas separation, U.S. Patent 5 104 425, (1992).
7. V.M. Linkov, R.D. Sanderson, E.P. Jacobs, Highly asymmetrical carbon membranes, J. Membr. Sci. 95 (1994) 93.
8. C.W. Jones, W.J. Koros, Carbon molecular sieve gas separation membranes-I. Preparation and characterization based on polyimide precursors, Carbon 32 (1994) 1419.
9. Y. Yin, R.E. Collins, Carbon molecular films produced by dc sputtering, Carbon 31 (1993) 1333.
10. C.Y. Hsu, L.Y. Chen, F.C.-N. Hong, Properties of diamond-like carbon films deposited by ion plating with a pulsed substrate bias, Diamond Relat. Mater. 7 (1998) 884.
11. H. Matsuyama, T. Shiraishi, M. Teramoto, Plasma polymerized membranes from organosilicon compounds for separation of oxygen over nitrogen, J. Appl. Polym. Sci. 54 (1994) 1665.
12. M. Yamamoto, J. Sakata, M. Hirai, Plasma polymerized membranes and gas permeability I, J. Appl. Polym. Sci. 29 (1984) 2981.
13. J. Sakata, M. Yamamoto, M. Hirai, Plasma polymerized membranes and gas permeability II, J. Appl. Polym. Sci. 31 (1986) 1999.
14. K. Kusakabe, Z.Y. Li, H. Maeda, S. Morooka, Preparation of supported composite membrane by pyrolysis of polycarbosilane for gas separation at high temperature, J. Membr. Sci. 103 (1995) 175.
15. 2 films, Chem. Eng. Sci. 44 (1989) 1829.
16. 2 -Vycor films, J. Membr. Sci. 87 (1994) 281.
17. 2 membrane formed in pores of alumina support tube by chemical vapor deposition with tetraethyl orthosilicate, Ind. Eng. Chem. Res. 33 (1994) 2096.
18. 2 membrane in macropores of α-alumina support tube by thermal decomposition of TEOS, J. Membr. Sci. 101 (1995) 89.
19. Z. Li, K. Kusakabe, S. Morooka, Preparation of thermostable amorphous Si-C-O membrane and its application to gas separation at elevated temperature, J. Membr. Sci. 87 (1996) 159.
20. A.B. Shelekhin, E.J. Grosgogeat, S.-T. Hwang, Gas separation properties of a new polymer/inorganic composite membrane, J. Membr. Sci. 66 (1992) 129.
21. D. Li, S.-T. Hwang, Preparation and characterization of silicon based inorganic membrane for gas separation, J. Membr. Sci. 59 (1991) 331.
22. D. Li, S.-T. Hwang, Gas separation by silicon based inorganic membrane at high temperature, J. Membr. Sci. 66 (1992) 119.
23. Z. Li, K. Kusakabe, S. Morooka, Pore structure and permeance of amorphous Si-C-O membranes with high durability at elevated temperature, Separ. Sci. Technol. 32 (1997) 1233.
24. F. Huber, J. Springer, M. Muhler, Plasma polymer membranes from hexafluoroethane/hydrogen mixtures for separation of oxygen and nitrogen, J. Appl. Polym. Sci. 63 (1997) 1517.