Structural properties of Fe ion implanted and ruby laser annealed Si layers

Journal of Physics D: Applied Physics

Volumn 37, Issue 3, 2004, Pages 468-471

  Bayazitov, R M ^a   Batalov, R I ^a   Khaibullin, I B ^a   Ivlev, G D ^b   Dezsi I ^c   Kotai E ^c  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

^b B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

^c WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; POSITIVE IONS; PULSED LASER APPLICATIONS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CELLULAR STRUCTURES;

IRON COMPOUNDS;

EID: 1042281209     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/3/026     Document Type: Conference Paper

References (20)

1. Bost M and Mahan J 1985 J. Appl. Phys. 58 2696-703
2. Lourenco M, Butler T, Kewell A, Gwilliam R, Kirkby K and Homewood K 2001 Japan. J. Appl. Phys. 40 4041-4
3. Suemasu T, Negishi Y, Takakura K and Hasegawa F 2000 Japan. J. Appl. Phys. 39 L1013-5
4. Chu S, Hirohada T, Nakajima K, Kan H and Hiruma T 2002 Japan. J. Appl. Phys. 41 L1200-2
5. Martinelli L, Grilli E, Guzzi M and Grimaldi M 2003 Appl. Phys. Lett. 83 794-6
6. Grimaldi M, Baeri P, Spinella C and Lagomarsino S 1992 Appl. Phys. Lett. 60 1132-4
7. Wagner S, Carpene E, Schaaf P and Weisheit M 2002 Appl. Surf. Sci. 186 156-61
8. Bayazitov R and Batalov R 2001 J. Phys.: Condens. Matter 13 L113-8
9. Bayazitov R, Batalov R, Galyautdinov M, Nurutdinov R, Dulova M and Shustov V 2002 Proc. 6th Int. Conf. on Modification of Materials with Particle Beams and Plasma Flows (Tomsk, Russia) pp 420-3
10. Hodgson R, Baglin J, Pal R, Neri J and Hammer D 1980 Appl. Phys. Lett. 37 187-9
11. Szilagyi E, Paszti F and Amsel G 1995 Nucl. Instrum. Methods B 100 103-21
12. Ziegler J, Biersack J and Littmark U 1985 The Stopping and Range of Ions in Solids (New York: Pergamon)
13. Van Gurp G, Eggermont G, Tamminga Y, Stacy W and Gijsbers J 1979 Appl. Phys. Lett. 35 273-5
14. Chen L, Hung L, Mayer J, Baglin J, Neri J and Hammer D 1982 Appl. Phys. Lett. 40 595-7
15. Bayazitov R, Zakirzyanova L, Khaibullin I, Isakov I and Chachakov A 1992 Vacuum 43 619-22
16. Terukov E and Kudoyarova V unpublished
17. Schuller B, Carius R and Mantl S 2003 J. Appl. Phys. 94 20711
18. Cullis A, Webber H, Poate J and Simons A 1980 Appl. Phys. Lett. 36 320-2
19. Khaibullin I, Shtyrkov E, Bayazitov R, Aganov R, Lohner T, Mezey G, Paszti F, Manuaba A, Kotai E and Gyulai J 1982 Nucl. Instrum. Methods 199 397-400
20. Dvurechensky A, Kachurin G, Nidaev E and Smirnov L 1982 Pulsed Annealing of Semiconductor Materials (Moscow: Nauka) (in Russian)