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Volumn 25, Issue 5, 2003, Pages 243-246

A Differentially Pumped Secondary Electron Detector for Low-Vacuum Scanning Electron Microscopy

Author keywords

Differential pumping; Low vacuum; Scanning electron microscope

Indexed keywords

ELECTROMAGNETIC WAVE BACKSCATTERING; ELECTRONS; GASES; MEMBRANES; PHOSPHORS; PHOTOMULTIPLIERS; PRESSURE EFFECTS;

EID: 1042280209     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950250505     Document Type: Article
Times cited : (12)

References (10)
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    • Danilatos GD: Cathodoluminescence and gaseous scintillation in the environmental SEM. Scanning 8, 279-284 (1986)
    • (1986) Scanning , vol.8 , pp. 279-284
    • Danilatos, G.D.1
  • 2
    • 62849103925 scopus 로고
    • Theory of the gaseous detector device in the ESEM
    • Danilatos GD: Theory of the gaseous detector device in the ESEM. Adv Electros Electr Phys 78, 1-102 (1990)
    • (1990) Adv Electros Electr Phys , vol.78 , pp. 1-102
    • Danilatos, G.D.1
  • 3
    • 36149054260 scopus 로고
    • Wide-band detector for micro-microampere low-energy electron currents
    • Everhart TE, Thornley RFM: Wide-band detector for micro-microampere low-energy electron currents. J Sci Instrum 37, 246-248 (1960)
    • (1960) J Sci Instrum , vol.37 , pp. 246-248
    • Everhart, T.E.1    Thornley, R.F.M.2
  • 4
    • 0006166989 scopus 로고
    • A new detection technique for high pressure SEM
    • Farley AN, Shah JS: A new detection technique for high pressure SEM. I Phys C Ser 93 241-242 (1988)
    • (1988) I Phys C Ser , vol.93 , pp. 241-242
    • Farley, A.N.1    Shah, J.S.2
  • 5
    • 0030279914 scopus 로고    scopus 로고
    • Measuring the performance of scanning electron microscope detectors
    • Joy DC, Joy CS, Bunn RD: Measuring the performance of scanning electron microscope detectors. Scanning 18, 533-538 (1996)
    • (1996) Scanning , vol.18 , pp. 533-538
    • Joy, D.C.1    Joy, C.S.2    Bunn, R.D.3
  • 6
    • 1042274541 scopus 로고    scopus 로고
    • LEO Electron Microscopy Limited: Scanning electron microscope, world patent WO9822971 (1998)
    • LEO Electron Microscopy Limited: Scanning electron microscope, world patent WO9822971 (1998)
  • 7
    • 0032170341 scopus 로고    scopus 로고
    • Secondary electron imaging in the variable pressure scanning electron microscope
    • Mohan A, Khanna N, Hwu J, Joy DC: Secondary electron imaging in the variable pressure scanning electron microscope. Scanning 20, 6, 436-441 (1998)
    • (1998) Scanning , vol.20 , Issue.6 , pp. 436-441
    • Mohan, A.1    Khanna, N.2    Hwu, J.3    Joy, D.C.4
  • 9
    • 0031074683 scopus 로고    scopus 로고
    • GEM: A new concept for electron amplification in gas detectors
    • Sauli F: GEM: A new concept for electron amplification in gas detectors. Nucl Instr Meth A 386, 531-534 (1997)
    • (1997) Nucl Instr Meth A , vol.386 , pp. 531-534
    • Sauli, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.