Fluctuation model of chemical mechanical planarization

Journal of the Electrochemical Society

Volumn 148, Issue 3, 2001, Pages

  Sukharev, Valeriy ^a  

^a AGERE SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1042266189     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1349878     Document Type: Article

References (3)

1. J. Warnock, J. Electrochem. Soc., 138, 2398 (1991).
2. L. M. Cook, J. Non-Cryst. Solids, 120, 152 (1990).
3. J. Tichy, J. A. Levert, L. Shan, and S. Danyluk, J. Electrochem. Soc., 146, 1523 (1999).