Complementary inchworm® actuator for high-force high-precision applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5390, Issue , 2004, Pages 13-23

  Waechter, David F ^a   Salisbury, Shaun ^b   Mrad, Ridha Ben ^b   Prasad, S Eswar ^a   Blacow, Richard G ^a   Yan, Bin ^a  

^a Sensor Technology Ltd   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

Actuator; Complementary; Inchworm; Piezoelectric

Indexed keywords

DELAY CIRCUITS; DIODES; ELECTRIC POTENTIAL; FEEDBACK CONTROL; PIEZOELECTRIC DEVICES; PRECISION ENGINEERING; SURFACE PROPERTIES;

COMPLEMENTARY; INCHWORM; NORMALLY CLAMPED (NC); PIEZOELECTRIC;

ACTUATORS;

EID: 10044245090     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.539414     Document Type: Conference Paper

References (8)

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