Packaging of Nanostructured Microelectromechanical Systems Microtriode Devices

Journal of Electronic Materials

Volumn 32, Issue 12, 2003, Pages 1360-1365

  Chen, L H ^a   Jin, S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Carbon nanotube; Microelectromechanical systems (MEMS); Microwave amplifier; Packaging

Indexed keywords

ARSENIC; CARBON NANOTUBES; CATHODES; ELECTRIC PROPERTIES; ELECTRON BEAMS; ELECTRON TUBES; GALLIUM COMPOUNDS; KINETIC ENERGY; MICROWAVE AMPLIFIERS; NANOSTRUCTURED MATERIALS; PACKAGING; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL SYSTEM (MEMS); MICROWAVE COMMUNICATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0942299502     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0101-7     Document Type: Conference Paper

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