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Volumn 24, Issue 6, 2004, Pages 1629-1632

Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer

Author keywords

Electrical properties; Electron microscopy; Films; PZT; X ray methods

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; PERMITTIVITY; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 0942291188     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00394-7     Document Type: Article
Times cited : (7)

References (8)
  • 1
    • 0034317719 scopus 로고    scopus 로고
    • Novel multibridge-structured piezoelectric microdevice for scanning force microscopy
    • Chu J. Wang Z.J. Maeda R. Kataoka K. Itoh T. Suga T. Novel multibridge-structured piezoelectric microdevice for scanning force microscopy J. Vac. Sci. - Technol. B18 2000 3604-3607
    • (2000) J. Vac. Sci. - Technol. , vol.B18 , pp. 3604-3607
    • Chu, J.1    Wang, Z.J.2    Maeda, R.3    Kataoka, K.4    Itoh, T.5    Suga, T.6
  • 2
    • 0032636536 scopus 로고    scopus 로고
    • Preparation and characterization of sol-gel derived PZT thin films for micro actuators
    • Wang Z.J. Maeda R. Kikuchi K. Preparation and characterization of sol-gel derived PZT thin films for micro actuators Proceedings of SPIE 3680 1999 948-955
    • (1999) Proceedings of SPIE , vol.3680 , pp. 948-955
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3
  • 3
    • 0034262439 scopus 로고    scopus 로고
    • Effect of Pb content in target on electrical properties of laser ablation derived PZT thin films
    • Wang Z.J. Kikuchi K. Maeda R. Effect of Pb content in target on electrical properties of laser ablation derived PZT thin films Jpn. J. Appl. Phys. 39 2000 5413-5417
    • (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 5413-5417
    • Wang, Z.J.1    Kikuchi, K.2    Maeda, R.3
  • 4
    • 0035455043 scopus 로고    scopus 로고
    • Microstructure and electrical properties of lead zirconate titanate thin films deposited by excimer laser ablation
    • Wang Z.J. Maeda R. Ichiki M. Kokawa H. Microstructure and electrical properties of lead zirconate titanate thin films deposited by excimer laser ablation Jpn. J. Appl. Phys. 40 2001 5523-5527
    • (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 5523-5527
    • Wang, Z.J.1    Maeda, R.2    Ichiki, M.3    Kokawa, H.4
  • 6
    • 0033338941 scopus 로고    scopus 로고
    • Effect of Pb content on electric properties of sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process
    • Wang Z.J. Maeda R. Kikuchi K. Effect of Pb content on electric properties of sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process Jpn. J. Appl. Phys. 38 1999 5342-5345
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5342-5345
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3
  • 7
    • 0034507025 scopus 로고    scopus 로고
    • Development of phases and texture in sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process
    • Wang Z.J. Maeda R. Kikuchi K. Development of phases and texture in sol-gel derived lead zirconate titanate thin films prepared by three-step heat-treatment process J. Mater. Sci. 35 2000 5915-5919
    • (2000) J. Mater. Sci. , vol.35 , pp. 5915-5919
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3
  • 8
    • 0033689198 scopus 로고    scopus 로고
    • Electron microscopic observation of the microstructure of sol-gel derived PZT thin film
    • Wang Z.J. Maeda R. Kikuchi K. Electron microscopic observation of the microstructure of sol-gel derived PZT thin film J. Japan Inst. Metals 64 2000 383-386
    • (2000) J. Japan Inst. Metals , vol.64 , pp. 383-386
    • Wang, Z.J.1    Maeda, R.2    Kikuchi, K.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.