The influence of the ion-atom potential on molecular dynamics simulations of sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 215, Issue 3-4, 2004, Pages 326-336

  Shapiro, M H ^a,b   Lu, Ping ^a,c  

^a CALIFORNIA STATE UNIVERSITY   (United States)

^b California Institute of Technology   (United States)

^c UNIVERSITY OF DENVER   (United States)

Author keywords

Ion atom potentials; Sputtered atoms; Sputtering

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; CORRELATION METHODS; CRYSTAL ORIENTATION; DIMERS; ION BOMBARDMENT; MOLECULAR DYNAMICS; PROBABILITY DENSITY FUNCTION; SPUTTERING; STATISTICAL METHODS;

ENERGY DISTRIBUTIONS; ION-ATOM POTENTIALS; SPUTTERED ATOMS;

ATOMIC PHYSICS;

EID: 0942267876     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.08.036     Document Type: Article

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