Cobalt (II) β-diketonate adducts as new precursors for the growth of cobalt oxide films by liquid injection MOCVD

Journal of Crystal Growth

Volumn 262, Issue 1-4, 2004, Pages 653-657

  Pasko, S ^a,b   Abrutis, A ^a   Hubert Pfalzgraf, L G ^b   Kubilius, V ^a  

^a VILNIUS UNIVERSITY   (Lithuania)

^b INST DE RECHERCHES SUR LA CATALYSE   (France)

Author keywords

A3. Metalorganic chemical vapor deposition; B1. Cobalt; B1. Metalorganic compounds; B1. Oxides

Indexed keywords

ATOMIC FORCE MICROSCOPY; COBALT COMPOUNDS; DIFFRACTOMETERS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDATION; PULSED LASER DEPOSITION; SAPPHIRE; SPUTTERING; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

LIQUID INJECTION; PRECURSORS;

ORGANOMETALLICS;

EID: 0842329933     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2003.10.077     Document Type: Article

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