Self-Aligned Top and Bottom Metal Double Gate Low Temperature Poly-Si TFT Fabricated at 550°C on Non-Alkali Glass Substrate by Using DPSS CW Laser Lateral Crystallization Method

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 211-214

  Hara, Akito ^a   Takei, Michiko ^a   Yoshino, Kenichi ^a   Takeuchi, Fumiyo ^a   Chida, Mitsuru ^a   Sasaki, Nobuo ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CONTINUOUS WAVE LASERS; CRYSTALLIZATION; EXCIMER LASERS; GRAIN BOUNDARIES; MOSFET DEVICES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; PUMPING (LASER); SCANNING ELECTRON MICROSCOPY;

GLASS SUBSTRATES; LATERAL CRYSTALLIZATION METHOD;

THIN FILM TRANSISTORS;

EID: 0842309821     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. K. Makihira et al.: Digest of The International Workshop on 2001 Active-Matrix Liquid-Crystal Displays -TFT Technologies and Related Materials(c/o Business Center for Academic Societies Japan, Tokyo, 2001) p. 243
2. A. Hara et al.: Digest of The International Workshop on 2001 Active-Matrix Liquid-Crystal Displays -TFT Technologies and Related Materials- (c/o Business Center for Academic Societies Japan, Tokyo, 2001) p. 227
3. F. Takeuchi et al.: Digest of The International Workshop on 2001 Active-Matrix Liquid-Crystal Displays -TFT Technologies and Related Materials(c/o Business Center for Academic Societies Japan, Tokyo, 2001) p. 251.
4. A. Hara et al.: Proceeding of 2001 International Electron Devices Meeting (Washington DC, 2001) p. 747.
5. A. Hara et al.: Jpn. J. Appl. Phys. 41 (2002) L311.
6. N. Sasaki et al.: Dig. of Tech. Papers of 2002 SID (Society for Information Display, Boston, 2002) p. 154.
7. A. Hara et al.: Digest of The International Workshop on 2002 Active-Matrix Liquid-Crystal Displays -TFT Technologies and Related Materials- (c/o Business Center for Academic Societies Japan, Tokyo, 2002) p. 227.