Formation of a Vertical MOSFET for Charge Sensing in a Si Micro-Fluidic Channel

Journal of the Korean Physical Society

Volumn 44, Issue 1, 2004, Pages 162-166

  Lyu, Hong Kun ^a   Kim, Dong Sun ^a   Shin, Jang Kyoo ^a   Choi, Pyung ^a   Lee, Jong Hyun ^a   Park, Hey Jung ^a   Park, Chin Sung ^b   Lim, Geunbae ^b  

^a Kyungpook National University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Charge sensing; MEMS; Micro fluidic channel; Vertical MOSFET

Indexed keywords

EID: 0842307457     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (14)

1. E. Souteyrand, J. P. Cloarec, J. R. Martin, C. Wilson, I. Lawrence, S. Mikkelsen and M. F. Lawrence, J. Phys. Chem. B 101, 2980 (1997).
2. C. Berggren, P. Stalhandske, J. Brundell and G. Johannson, Electroanalysis 11, 156 (1999).
3. Chong H. Ahn, Microprocesses and Nanotechnology Conference (Tokyo, Oct., 2001), p. 16.
4. N. Seong, J. J. Pak, J. H. Choi, D. J. Ahn, S.-M. Hwang and K. J. Lee, J. Korean Phys. Soc. 40, 605 (2002).
5. B.-P. Mun, M.-Y. Son, H.-S. Jeon and C.-J. Kim, J. Korean Phys. Soc. 43, 935 (2003).
6. D. L. Kendall, J. Vac. Sci. Technol. A 8, 3598 (1990).
7. O. Tabata, R. Asahi, H. Funabashi and S. Sugiyama, Sensors and Actuators A 34, 51 (1992).
8. V. Rehacek, I. Novotny, V. Tvarozek, M. Riepl, T. Hirsch, M. Mass, R. Schweiss, V. M. Mirsky and O. S. Wolfbeis, ASDAM '98. Second International Conference (Slovakia, Oct., 1998), p. 255.
9. J. Rickert, T. Weiss, W. Kraas, G. Jung and W. Gopel, Solid-State Sensors and Actuators, The 8th International Conference (Australia, July, 1995), p. 528.
10. C. Berggren and G. Johansson, Anal. Chem. 69, 3651 (1997).
11. K. Sato, M. Shikida, T. Yamashiro, K. Asaumi, Y. Iriye and M. Yamamoto, in Proc. Micro Electro Mechanical Systems (Heidelberg, Jan., 1998), p. 556.
12. Patrice Grignoux and Randall L. Geiger, IEEE Trans. Electron Dev. ED-29, 1261 (1982).
13. M. Peckerar, F. K. Perkins, A. Hodge-Miller, R. Ehrlich, S. Fertig and L. Tender, IEEE Circ. Dev. Mag. 19, 17 (2003).
14. D.-S. Kim, Y.-T. Jeong, H.-K. Lyu, H.-J. Park, H. S. Kim, J.-K. Shin, P. Choi, J.-H. Lee, G. Lim and M. Ishida, Jpn. J. Appl. Phys. 42, 4111 (2003).