Improved hydrogenated amorphous silicon thin films by photon assisted microwave electron cyclotron resonance chemical vapor deposition

Applied Physics Letters

Volumn 74, Issue 1, 1999, Pages 67-69

  Song, Y J ^a   Anderson, W A ^a  

^a UNIVERSITY OF MASSACHUSETTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0742330609     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122954     Document Type: Article

References (12)

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