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Volumn 15, Issue 1, 2004, Pages 35-43
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Defect detection in unpolished Si wafers by digital shearography
a a b a |
Author keywords
COPs; Digital shearography; Semiconductor defect detection
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Indexed keywords
CAMERAS;
CHARGE COUPLED DEVICES;
CRYSTAL STRUCTURE;
IMAGE PROCESSING;
POLISHING;
SHEARING;
TRANSISTORS;
SHEAROGRAPHY;
SILICON WAFERS;
DEFECT;
DETECTION METHOD;
DIGITAL COMPUTER;
INDUSTRIAL APPLICATION;
MICROELECTRONICS;
SILICON;
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EID: 0742322447
PISSN: 09570233
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-0233/15/1/005 Document Type: Article |
Times cited : (37)
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References (12)
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