Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section

Chinese Physics Letters

Volumn 21, Issue 1, 2004, Pages 104-106

  Xia, Jin Song ^a   Yu, Jin Zhong ^a   Fan, Zhong Chao ^a   Wang, Zhang Tao ^a   Chen, Shao Wu ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PROPAGATION METHOD; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; WAVEGUIDES;

3 DB COUPLERS; ANISOTROPIC CHEMICAL ETCHING; MULTI-MODE INTERFERENCE; OPTICAL COUPLER; POTASSIUM HYDROXIDE KOH; RIB WAVEGUIDES; SILICON ON INSULATOR; SILICON ON INSULATOR WAFERS; SILICON RIB WAVEGUIDES; TRAPEZOIDAL CROSS SECTIONS;

POTASSIUM HYDROXIDE;

EID: 0742288571     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/21/1/032     Document Type: Article

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