X-ray Reflectometer for the Diagnostics of Thin Films during Growth

Journal of Applied Crystallography

Volumn 30, Issue 6, 1997, Pages 905-908

  Niggemeier, U ^a   Lischka, K ^a   Plotz, W M ^b   Holy, V ^c  

^a UNIVERSITY OF PADERBORN   (Germany)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^c MASARYK UNIVERSITY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0642332291     PISSN: 00218898     EISSN: None     Source Type: Journal    
DOI: 10.1107/S0021889897002483     Document Type: Article

References (14)

1. Chason, E. & Chason, M. (1994). J. Vac. Sci. Technol. A12, 1565-1568.
2. Chason, E., Mayer, T. M., McIllroy, D. & Matzke, C. M. (1993). Nucl. Instrum. Methods Phys. Res. B80/81, 742-746.
3. Chihab, J. & Naudon, A. (1992). J. Phys. III Fr. 2, 2291-2300.
4. Chládek M., Dorner, C., Buchal, A., Valvoda, V. & Hoffmann, H. (1996). J. Appl. Phys. 80, 1437-1445.
5. Holy, V., Kubena, J., Ohlidal, I., Lischka, K. & Plotz, W. (1993). Phys. Rev. B, 47, 15896-15903.
6. Johansson, T. (1933). Z. Phys. 82, 507-528.
7. Lairson, B. M., Payne, A. P., Brennan, S., Rensing, N. M. Daniels, B. J. & Clemens, B. M. (1995). J. Appl. Phys 78, 4449-4455.
8. Naudon, A., Chihab, J., Goudeau, P. & Mimault, J. (1989). J. Appl. Cryst. 22, 460-464.
9. Plotz, W. M., Holy, V., Hoogenhof, W. & Lischka, K. (1994). J. Phys. III Fr. 4, 1565-1571.
10. Plotz, W. M. & Lischka, K. (1994). J. Phys. III Fr. 4, 1503-1511.
11. Schlatmann, R., Lu, C., Verhoeven, J., Puik, E. J. & van der Wiel, M. J. (1994). Appl. Surf. Sci. 78, 147-157.
12. Sinha, S. K. (1991). Physica B, 173, 25-34.
13. Stamm, M. (1992). Physics of Polymer Surfaces and Interfaces, edited by I. C. Sanchez, p. 163. Boston: Butterworth-Heinemann.
14. Zabel, H. (1994). Appl. Phys. A58, 159-168.