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Volumn 48, Issue 4, 2004, Pages 497-503
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CMOS downsizing toward sub-10 nm
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Author keywords
CMOS; Downsizing; MOSFETs; Scaling; Silicon; Transistor
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Indexed keywords
GATES (TRANSISTOR);
INTEGRATED CIRCUITS;
LSI CIRCUITS;
MICROPROCESSOR CHIPS;
MOSFET DEVICES;
MULTILAYERS;
PROBLEM SOLVING;
SILICON;
DOWNSIZING;
SCALING;
CMOS INTEGRATED CIRCUITS;
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EID: 0442296357
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/j.sse.2003.09.034 Document Type: Conference Paper |
Times cited : (45)
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References (6)
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