Deposition of diamond from alcohol precursors in an electron cyclotron resonance plasma system

Journal of Electronic Materials

Volumn 26, Issue 11, 1997, Pages 1326-1330

  Gilbert, Donald R ^a   Carasso, Melanie L ^a   Demkowicz, Paul A ^a   Singh, Rajiv K ^a   Adair, James H ^a  

^a University of Florida   (United States)

Author keywords

Diamond films; Electron cyclotron resonance (ECR) plasma; Microstructural control; Nucleation density

Indexed keywords

EID: 0348235970     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0079-7     Document Type: Article

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