Parameter detection of thin films from their X-ray reflectivity by support vector machines

Applied Numerical Mathematics

Volumn 48, Issue 2, 2004, Pages 223-236

  Strauß, Daniel J ^a   Steidl, Gabriele ^a   Welzel, Udo ^b  

^a UNIVERSITY OF MANNHEIM   (Germany)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Optical matrix method; Radial basis functions; Reproducing kernel Hilbert spaces; Support vector machines; X ray reflectometry

Indexed keywords

ALGORITHMS; APPROXIMATION THEORY; AUTOMATION; BACKPROPAGATION; COMPUTER SIMULATION; CURVE FITTING; INTEGRATED CIRCUITS; MATRIX ALGEBRA; QUADRATIC PROGRAMMING; REGRESSION ANALYSIS; SURFACE ROUGHNESS; THIN FILMS; X RAYS;

HILBERT SPACES; REFLECTIVITY CURVES; SUPPORT VECTOR MACHINES (SVM);

PARAMETER ESTIMATION;

EID: 0348046424     PISSN: 01689274     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apnum.2003.07.002     Document Type: Article

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