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Volumn 340-342, Issue , 2003, Pages 939-943
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Iron disilicide formed in a-Si〈Fe〉 thin films by magnetron co-sputtering
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Author keywords
Iron dicilicide; Magnetron; Photoluminescence; Thin films
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Indexed keywords
ENERGY GAP;
ION IMPLANTATION;
LIGHT ABSORPTION;
MAGNETRON SPUTTERING;
MICROSTRUCTURE;
OPTOELECTRONIC DEVICES;
PHONONS;
PHOTOLUMINESCENCE;
SILICON;
THIN FILMS;
OPTICAL GAPS;
THIN-FILM STRUCTURES;
IRON COMPOUNDS;
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EID: 0347946855
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2003.09.200 Document Type: Conference Paper |
Times cited : (3)
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References (15)
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