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Volumn 340-342, Issue , 2003, Pages 939-943

Iron disilicide formed in a-Si〈Fe〉 thin films by magnetron co-sputtering

Author keywords

Iron dicilicide; Magnetron; Photoluminescence; Thin films

Indexed keywords

ENERGY GAP; ION IMPLANTATION; LIGHT ABSORPTION; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTOELECTRONIC DEVICES; PHONONS; PHOTOLUMINESCENCE; SILICON; THIN FILMS;

EID: 0347946855     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2003.09.200     Document Type: Conference Paper
Times cited : (3)

References (15)
  • 6
    • 0035510738 scopus 로고    scopus 로고
    • Batalov R.I., Bayazitov R.M., Terukov E.I., et al. Fiz. Tekh. Poluprovodn. (St. Petersburg). 35(11):2001;1320 Batalov R.I., Bayazitov R.M., Terukov E.I., et al. Semiconductors. 35:2001;1263.
    • (2001) Semiconductors , vol.35 , pp. 1263
    • Batalov, R.I.1    Bayazitov, R.M.2    Terukov, E.I.3
  • 8
    • 0004155571 scopus 로고
    • Trans Tech Publications, Clausthal-Zellerfeld
    • B.L. Sharma, in: Diffusion in Semiconductors, Trans Tech Publications, Clausthal-Zellerfeld, 1970, p. 87.
    • (1970) Diffusion in Semiconductors , pp. 87
    • Sharma, B.L.1
  • 10
    • 0036856538 scopus 로고    scopus 로고
    • Terukov E.I., Kon'kov O.I., Kudoyarova V.Kh., et al. Fiz. Tekh. Poluprovodn. (St. Petersburg). 36(11):2002;1318 Terukov E.I., Kon'kov O.I., Kudoyarova V.Kh., et al. Semiconductors. 36:2002;1235.
    • (2002) Semiconductors , vol.36 , pp. 1235
    • Terukov, E.I.1    Kon'kov, O.I.2    Kudoyarova, V.Kh.3
  • 13
    • 0003438120 scopus 로고
    • International Center for Diffraction Data, Swarthmore
    • JCPDS Powder Diffraction File, International Center for Diffraction Data, Swarthmore, 1989.
    • (1989) JCPDS Powder Diffraction File
  • 15
    • 0000151431 scopus 로고
    • Drozdov N.A., Patrin A.A. Pis'ma Zh. Éksp. Teor. Fiz. 23:1976;800 Drozdov N.A., Patrin A.A. JETP Lett. 23:1976;597.
    • (1976) JETP Lett. , vol.23 , pp. 597
    • Drozdov, N.A.1    Patrin, A.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.