A method to predict electromigration failure of metal lines

Journal of Applied Physics

Volumn 86, Issue 11, 1999, Pages 6043-6051

  Sasagawa, Kazuhiko ^a   Naito, Kazushi ^b   Saka, Masumi ^b   Abé, Hiroyuki ^b  

^a HIROSAKI UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347854534     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371652     Document Type: Article

References (11)

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