Fabrication of single-crystal Si microstructures by anodization

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 12 SUPPL. B, 1996, Pages 6648-6651

  Higa, Katsuya ^a   Asano, Tanemasa ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Anodization; Microcantilever; Micromachining; Piezoresistive gauge; Porous Si; Si microstructure

Indexed keywords

EID: 0000770704     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.6648     Document Type: Article

References (4)

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2. C. S. Cho, I. S. Yu, J. K. Shin and J. H. Lee: Ext. Abs. Microprocess Conf. (1993) p. 198.
3. C. W. Magee and C. P. Wu: Nucl. Instrum. & Method 145 (1978) 529.
4. M. Yoshizawa, M. Miyake and H. Harada: J. Electrochem. Soc. 131 (1984) 453.